Skip navigation
Home
Browse
Communities
& Collections
Browse Items by:
Issue Date
Author
Title
Subject
Help
Sign on to:
My RDA
Receive email
updates
Edit Profile
SLIIT RDA
Search
Search:
All of DSpace
IEEE
Faculty of Engineering
Department of Materials Engineering
Research Papers
for
Current filters:
Title
Author
Subject
Date Issued
Has File(s)
???jsp.search.filter.original_bundle_filenames???
???jsp.search.filter.original_bundle_descriptions???
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Start a new search
Add filters:
Use filters to refine the search results.
Title
Author
Subject
Date Issued
Has File(s)
???jsp.search.filter.original_bundle_filenames???
???jsp.search.filter.original_bundle_descriptions???
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results 1-1 of 1 (Search time: 0.001 seconds).
previous
1
next
Item hits:
Issue Date
Title
Author(s)
2005-03-21
Effect of fluorine implantation dose on boron transient enhanced diffusion and boron thermal diffusion in Si/sub 1-x/Ge/sub x/
Mubarek, H.A.W.E
;
Karunaratne, M. S. A
;
Bonar, J. M
;
Dilliway, G. D
;
Wang, Y.
;
Hemment, P. L. F
Discover
Author
1
Bonar, J. M
1
Dilliway, G. D
1
Hemment, P. L. F
1
Karunaratne, M. S. A
1
Wang, Y.
Subject
1
boron thermal diffusion
1
boron transient
1
Diffusion processes
1
Electron microscopy
1
Ion implantation
1
Mass spectroscopy
Date issued
1
2005
Has File(s)
1
true