Skip navigation
Home
Browse
Communities
& Collections
Browse Items by:
Issue Date
Author
Title
Subject
Help
Sign on to:
My RDA
Receive email
updates
Edit Profile
SLIIT RDA
Search
Search:
All of DSpace
SLIIT Staff Publications
Faculty of Engineering
Department of Materials Engineering
Research Papers - SLIIT Staff Publications
for
Current filters:
Title
Author
Subject
Date Issued
Has File(s)
???jsp.search.filter.original_bundle_filenames???
???jsp.search.filter.original_bundle_descriptions???
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Start a new search
Add filters:
Use filters to refine the search results.
Title
Author
Subject
Date Issued
Has File(s)
???jsp.search.filter.original_bundle_filenames???
???jsp.search.filter.original_bundle_descriptions???
Equals
Contains
ID
Not Equals
Not Contains
Not ID
Results 1-2 of 2 (Search time: 0.0 seconds).
previous
1
next
Item hits:
Issue Date
Title
Author(s)
2004-10-15
Effect of fluorine implantation dose on boron thermal diffusion in silicon
Mubarek, H A. W El
;
Bonar, J.M
;
Dilliway, G.D
;
Karunaratne, M. S. A
;
Willoughby, A. F
;
Wang, Y
2005-03-21
Effect of fluorine implantation dose on boron transient enhanced diffusion and boron thermal diffusion in Si/sub 1-x/Ge/sub x
Mubarek, HAW El
;
Bonar, J M
;
Dilliway, G D
;
Wang, Y
;
Hemment, Peter L F
;
Willoughby, A F
;
Ashburn, Peter
;
Karunaratne, M. S. A
Discover
Author
2
Karunaratne, M. S. A
1
Ashburn, Peter
1
Bonar, J M
1
Bonar, J.M
1
Dilliway, G D
1
Dilliway, G.D
1
Hemment, Peter L F
1
Mubarek, H A. W El
1
Mubarek, HAW El
1
Willoughby, A F
.
next >
Subject
1
Boron
1
Diffusion processes
1
Electron microscopy
1
Fluorine
1
fluorine implantation
1
Germanium alloys
1
Heterojunction bipolar transistors
1
Ion implantation
1
Mass spectroscopy
1
silicon
.
next >
Date issued
1
2004
1
2005
Has File(s)
2
true